22 June 2013 Gated imaging for multi-layer wave-front sensing and surface reconstruction
Author Affiliations +
Proceedings Volume 8769, International Conference on Optics in Precision Engineering and Nanotechnology (icOPEN2013); 87690B (2013) https://doi.org/10.1117/12.2020845
Event: International Conference on Optics in Precision Engineering and Nanotechnology (icOPEN2013), 2013, Singapore, Singapore
Abstract
Recently, semiconductor manufacturers have been striving for high speed, large scale multi-layer wafer surface measurement. In this paper, we propose a novel technique in multi-layer wave-front sensing. The measurement uses a gated camera in pico second shutter that can be synchronized to a pico second laser pulse, up to μm accuracy. Subsequently, we propose a compensation technique using time-of-flight wave-front sensing to reconstruct the multilayer surfaces using our proposed gated imaging technique.
© (2013) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
ChingSeong Tan, ChingSeong Tan, Xin Wang, Xin Wang, Wee Keong Lim, Wee Keong Lim, Yong Han Ng, Yong Han Ng, Tong Yuen Chai, Tong Yuen Chai, } "Gated imaging for multi-layer wave-front sensing and surface reconstruction", Proc. SPIE 8769, International Conference on Optics in Precision Engineering and Nanotechnology (icOPEN2013), 87690B (22 June 2013); doi: 10.1117/12.2020845; https://doi.org/10.1117/12.2020845
PROCEEDINGS
6 PAGES


SHARE
Back to Top