Dual wavelength digital holography for improving the measurement accuracy

Jianglei Di; Weijuan Qu; Bingjing Wu; Xin Chen; Jianlin Zhao; Anand Asundi

doi:10.1117/12.2020394

22 June 2013 Dual wavelength digital holography for improving the measurement accuracy

Jianglei Di, Weijuan Qu, Bingjing Wu, Xin Chen, Jianlin Zhao, Anand Asundi

Proceedings Volume 8769, International Conference on Optics in Precision Engineering and Nanotechnology (icOPEN2013); 87690G (2013) https://doi.org/10.1117/12.2020394
Event: International Conference on Optics in Precision Engineering and Nanotechnology (icOPEN2013), 2013, Singapore, Singapore

Abstract

In dual wavelength digital holography, a synthetic wavelength is obtained by using two lasers with different wavelengths to expand the measurement range of samples’ step heights from nanometers to micrometers. However, its measurement accuracy reduces along with the expansion of measuring range and significant noise is introduced at the same time. For cases where the sample’s height is smaller than the wavelength of illumination light, the measurement accuracy is very important. In this paper, a new approach of dual wavelength digital holography is presented. The synthetic wavelength is smaller than the wavelength of the two different lasers. Higher measurement accuracy can thus be achieved. The analysis and experimental results show the validity of this method.

Citation Download Citation

Jianglei Di, Weijuan Qu, Bingjing Wu, Xin Chen, Jianlin Zhao, and Anand Asundi "Dual wavelength digital holography for improving the measurement accuracy", Proc. SPIE 8769, International Conference on Optics in Precision Engineering and Nanotechnology (icOPEN2013), 87690G (22 June 2013); https://doi.org/10.1117/12.2020394

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