22 June 2013 One-dimensional surface profile measurement by detection of reflecting direction of a scanned laser beam
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Proceedings Volume 8769, International Conference on Optics in Precision Engineering and Nanotechnology (icOPEN2013); 876919 (2013) https://doi.org/10.1117/12.2020983
Event: International Conference on Optics in Precision Engineering and Nanotechnology (icOPEN2013), 2013, Singapore, Singapore
Abstract
A laser beam is scanned on an object surface with a fast scanning system which consists of a rotating mirror, a flat mirror, and a concave spherical mirror. Propagation direction of the laser beam reflected by a sample surface is detected with a lens and a position sensitive detector. A one-dimensional surface profile of the sample surface is measured by integrating a slop distribution obtained from the propagation direction of the reflected beam. The measurement is insensitivity to mechanical vibrations because of a high-speed scanning of a few milliseconds. The required positioning accuracy of the sample surface is lower than a few millimeters. The measurement repeatability is less than 10 nm.
© (2013) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Osami Sasaki, Osami Sasaki, Ryo Shinozaki, Ryo Shinozaki, Takamasa Suzuki, Takamasa Suzuki, } "One-dimensional surface profile measurement by detection of reflecting direction of a scanned laser beam", Proc. SPIE 8769, International Conference on Optics in Precision Engineering and Nanotechnology (icOPEN2013), 876919 (22 June 2013); doi: 10.1117/12.2020983; https://doi.org/10.1117/12.2020983
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