Paper
22 June 2013 A simulation study on the inspection of transparent circuits with narrow line widths by using a PDLC/ITO film
C.-H. Chan, S.-C. Lin, Y.-T. Zou, C.-T. Chen, T.-K. Liu, C.-H. Chen, H.-W. Wang
Author Affiliations +
Proceedings Volume 8769, International Conference on Optics in Precision Engineering and Nanotechnology (icOPEN2013); 87691E (2013) https://doi.org/10.1117/12.2021027
Event: International Conference on Optics in Precision Engineering and Nanotechnology (icOPEN2013), 2013, Singapore, Singapore
Abstract
In this study, it is of interest to find a way to inspect transparent circuits with narrow line widths (<30 μm). A PDLC/ITO film with a thinner PET layers (1 and 5 μm) will be adopted as the sensing device. Simulations were conducted to evaluate the performance of the proposed system and study effects of system parameters on the limitation of the proposed system.
© (2013) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
C.-H. Chan, S.-C. Lin, Y.-T. Zou, C.-T. Chen, T.-K. Liu, C.-H. Chen, and H.-W. Wang "A simulation study on the inspection of transparent circuits with narrow line widths by using a PDLC/ITO film", Proc. SPIE 8769, International Conference on Optics in Precision Engineering and Nanotechnology (icOPEN2013), 87691E (22 June 2013); https://doi.org/10.1117/12.2021027
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KEYWORDS
Positron emission tomography

Inspection

Sensing systems

Device simulation

Transparent conductors

Oxides

Sensors

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