22 June 2013 Specular 3D shape measurement with a compact fringe reflection system
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Proceedings Volume 8769, International Conference on Optics in Precision Engineering and Nanotechnology (icOPEN2013); 87691K (2013) https://doi.org/10.1117/12.2018927
Event: International Conference on Optics in Precision Engineering and Nanotechnology (icOPEN2013), 2013, Singapore, Singapore
Abstract
The three-dimensional (3D) metrology for specular reflecting surfaces attracted much attention due to their various applications in optics, electronics, or semiconductor industry. Fringe reflection technique is an effective tool to measure the specular surface slopes (gradient information), and then reconstruct the surface shape from gradient. However, most of the fringe reflection systems are built up for middle size (~10,000 mm2) or larger size (~100,000 mm2) objects by using the off-the-shelf desktop displays. In order to measure samples with smaller size (~200 mm2) with higher measuring resolution, a compact fringe reflection system is proposed. The performance of the compact specular 3D shape measurement system is demonstrated with experiments.
© (2013) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Lei Huang, Lei Huang, Jun Xian Wong, Jun Xian Wong, Anand Asundi, Anand Asundi, } "Specular 3D shape measurement with a compact fringe reflection system", Proc. SPIE 8769, International Conference on Optics in Precision Engineering and Nanotechnology (icOPEN2013), 87691K (22 June 2013); doi: 10.1117/12.2018927; https://doi.org/10.1117/12.2018927
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