22 June 2013 CCD evaluation for estimating measurement precision in lateral shearing interferometry
Author Affiliations +
Proceedings Volume 8769, International Conference on Optics in Precision Engineering and Nanotechnology (icOPEN2013); 87691R (2013) https://doi.org/10.1117/12.2019073
Event: International Conference on Optics in Precision Engineering and Nanotechnology (icOPEN2013), 2013, Singapore, Singapore
Abstract
Because of larger measurement ability of wave-front deviation and no need of reference plat, the lateral shearing interferometry based on four step phase shifting has been widely used for wave-front measurement. After installation shearing interferograms are captured by CCD camera, and the actual phase data of wave-front can be calculated by four step phase shift algorithm and phase unwrapping. In this processing, the pixel resolution and gray scale of CCD camera is the vital factor for the measurement precision. In this paper, Based on the structure of lateral shearing surface interferometer with phase shifting, pixel resolution more or less for measurement precision is discussed. Also, the gray scale is 8 bit, 12 bit or 16 bit for measurement precision is illustrated by simulation.
© (2013) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Bingcai Liu, Bingcai Liu, Bing Li, Bing Li, Ailing Tian, Ailing Tian, Baopeng Li, Baopeng Li, } "CCD evaluation for estimating measurement precision in lateral shearing interferometry", Proc. SPIE 8769, International Conference on Optics in Precision Engineering and Nanotechnology (icOPEN2013), 87691R (22 June 2013); doi: 10.1117/12.2019073; https://doi.org/10.1117/12.2019073
PROCEEDINGS
6 PAGES


SHARE
RELATED CONTENT

Development of in-line laser interference microscope
Proceedings of SPIE (June 15 2015)
Three-lambda metrology
Proceedings of SPIE (June 20 2002)
Young's module measurement of an elastomer using ESPI
Proceedings of SPIE (February 14 2005)

Back to Top