22 June 2013 Fabrication of multilevel spiral phase plates by focused ion beam milling
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Proceedings Volume 8769, International Conference on Optics in Precision Engineering and Nanotechnology (icOPEN2013); 87691S (2013) https://doi.org/10.1117/12.2021061
Event: International Conference on Optics in Precision Engineering and Nanotechnology (icOPEN2013), 2013, Singapore, Singapore
Abstract
A focused Ga+ ion beam is used to mill a multilevel spiral phase plate at an acceleration voltage of 30 kV. Circular spiral phase plate with eight levels is fabricated directly on an indium-tin-oxide coated glass plate. Scanning electron microscopy images demonstrate the realization of multilevel phase plate on glass plate using focused ion beam milling.
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V. Pramitha, V. Pramitha, A. Vijayakumar, A. Vijayakumar, Shanti Bhattacharya, Shanti Bhattacharya, } "Fabrication of multilevel spiral phase plates by focused ion beam milling", Proc. SPIE 8769, International Conference on Optics in Precision Engineering and Nanotechnology (icOPEN2013), 87691S (22 June 2013); doi: 10.1117/12.2021061; https://doi.org/10.1117/12.2021061
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