22 June 2013 To develop a high speed auto-alignment system by dual machine vision based alignment system
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Proceedings Volume 8769, International Conference on Optics in Precision Engineering and Nanotechnology (icOPEN2013); 87692Q (2013) https://doi.org/10.1117/12.2018829
Event: International Conference on Optics in Precision Engineering and Nanotechnology (icOPEN2013), 2013, Singapore, Singapore
Abstract
In this paper, 2 sub machine vision based alignment systems were used to establish a high speed alignment system for screen printing. It can be used on the solar cell and flat display panel manufacture. The 2 sub alignment system can auto align target simultaneously. When one target was takes out, another target can implement auto alignment simultaneously. It can save the wait time for target take out procedure. The sub alignment system includes 4 CCD cameras, 4 lens, 4 outer coaxial LED light sources, a vacuum table and a 3 axis motorized stage. The alignment accuracy is about 1 μm.
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Chun-Jen Chen, Wenyuh Jywe, Yunfeng Teng, Yi-Ju Chen, Min-Wei Hung, "To develop a high speed auto-alignment system by dual machine vision based alignment system", Proc. SPIE 8769, International Conference on Optics in Precision Engineering and Nanotechnology (icOPEN2013), 87692Q (22 June 2013); doi: 10.1117/12.2018829; https://doi.org/10.1117/12.2018829
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