22 June 2013 The relationships between system transfer function and power spectral density measurements
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Proceedings Volume 8769, International Conference on Optics in Precision Engineering and Nanotechnology (icOPEN2013); 87692W (2013) https://doi.org/10.1117/12.2020952
Event: International Conference on Optics in Precision Engineering and Nanotechnology (icOPEN2013), 2013, Singapore, Singapore
Abstract
Power spectral density (PSD) is being used to evaluate the surface finish and wavefront errors in mid-spatial frequency of optical components, but whether a PSD curve is credible or not is now a problem to be solved urgently. PSD curves measured by different instruments make an influence on the estimate of optical components. In order to solve this problem, we use system transfer function (STF) to find the relationships between different instruments and PSD measurements. A mathematical model of STF and PSD measurement is established to stimulate and find the floor level of STF to get a credible PSD. The experiment results that the instruments with STF at least 60% can be used in mid-spatial frequency measurements.
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Xiaofeng Wang, Xiaofeng Wang, Jianxin Li, Jianxin Li, Rihong Zhu, Rihong Zhu, Rong Ji, Rong Ji, } "The relationships between system transfer function and power spectral density measurements", Proc. SPIE 8769, International Conference on Optics in Precision Engineering and Nanotechnology (icOPEN2013), 87692W (22 June 2013); doi: 10.1117/12.2020952; https://doi.org/10.1117/12.2020952
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