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22 June 2013 Experimental research of digital holographic microscopic measuring
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Proceedings Volume 8769, International Conference on Optics in Precision Engineering and Nanotechnology (icOPEN2013); 87692X (2013)
Event: International Conference on Optics in Precision Engineering and Nanotechnology (icOPEN2013), 2013, Singapore, Singapore
Digital holography is a new imaging technique, which is developed on the base of optical holography, Digital processing, and Computer techniques. It is using CCD instead of the conventional silver to record hologram, and then reproducing the 3D contour of the object by the way of computer simulation. Compared with the traditional optical holographic, the whole process is of simple measuring, lower production cost, faster the imaging speed, and with the advantages of non-contact real-time measurement. At present, it can be used in the fields of the morphology detection of tiny objects, micro deformation analysis, and biological cells shape measurement. It is one of the research hot spot at home and abroad. This paper introduced the basic principles and relevant theories about the optical holography and Digital holography, and researched the basic questions which influence the reproduce images in the process of recording and reconstructing of the digital holographic microcopy. In order to get a clear digital hologram, by analyzing the optical system structure, we discussed the recording distance and of the hologram. On the base of the theoretical studies, we established a measurement and analyzed the experimental conditions, then adjusted them to the system. To achieve a precise measurement of tiny object in three-dimension, we measured MEMS micro device for example, and obtained the reproduction three-dimensional contour, realized the three dimensional profile measurement of tiny object. According to the experiment results consider: analysis the reference factors between the zero-order term and a pair of twin-images by the choice of the object light and the reference light and the distance of the recording and reconstructing and the characteristics of reconstruction light on the measurement, the measurement errors were analyzed. The research result shows that the device owns certain reliability.
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Xueliang Zhu, Feifei Chen, and Jicheng Li "Experimental research of digital holographic microscopic measuring", Proc. SPIE 8769, International Conference on Optics in Precision Engineering and Nanotechnology (icOPEN2013), 87692X (22 June 2013);

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