22 June 2013 Auto gain tuning method for high performance of atomic force microscope
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Proceedings Volume 8769, International Conference on Optics in Precision Engineering and Nanotechnology (icOPEN2013); 87693I (2013) https://doi.org/10.1117/12.2021260
Event: International Conference on Optics in Precision Engineering and Nanotechnology (icOPEN2013), 2013, Singapore, Singapore
Abstract
The performance of Atomic Force Microscope depends on the control gains. However, the optimal gains have uncertainties which are impacted by cantilever properties, sample properties and measurement environment. In commercial AFM, it is not easy to get good AFM imaging results since the controller is manually tuned by user. In this paper, auto gain tuning algorithm is suggested for the high performance and automation of AFM. Auto gain tuning algorithm is evaluated by step responses, frequency responses and AFM imaging results.
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Jiseong Jeong, Jiseong Jeong, Junhyun Jo, Junhyun Jo, Kyihwan Park, Kyihwan Park, } "Auto gain tuning method for high performance of atomic force microscope", Proc. SPIE 8769, International Conference on Optics in Precision Engineering and Nanotechnology (icOPEN2013), 87693I (22 June 2013); doi: 10.1117/12.2021260; https://doi.org/10.1117/12.2021260
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