22 June 2013 Alternative displacement sensor with reflection type holographic grating
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Proceedings Volume 8769, International Conference on Optics in Precision Engineering and Nanotechnology (icOPEN2013); 87693K (2013) https://doi.org/10.1117/12.2018657
Event: International Conference on Optics in Precision Engineering and Nanotechnology (icOPEN2013), 2013, Singapore, Singapore
Abstract
In this study, we proposed an alternative displacement sensor which constructed with reflection type holographic diffraction grating. To integrate with the truly phase detection heterodyne interferometer, and then the in-plane displacement can be measured with sub-nanometer displacement resolution. The smallest variation can be observed of proposed method is approximately 20 pm and there are no significant differences between proposed method and comparison methods. Furthermore, we evaluated the thermal property of the hologram and showed that the grating pitch variation is smaller than 0.1 nm for temperature variations within 1 °C. According to these findings, we can conclude that the holographic grating can be an alternative displacement sensor with high sensitivity and high stability.
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Yao-Yuan Ho, Yao-Yuan Ho, Zhi-Ru Lin, Zhi-Ru Lin, Cheng-Chih Hsu, Cheng-Chih Hsu, Chyan-Chyi Wu, Chyan-Chyi Wu, Ju-Yi Lee, Ju-Yi Lee, } "Alternative displacement sensor with reflection type holographic grating ", Proc. SPIE 8769, International Conference on Optics in Precision Engineering and Nanotechnology (icOPEN2013), 87693K (22 June 2013); doi: 10.1117/12.2018657; https://doi.org/10.1117/12.2018657
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