15 March 2013 Two methods of pumping for eximer laser pulse-stretching
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Proceedings Volume 8770, 17th International School on Quantum Electronics: Laser Physics and Applications; 87700C (2013) https://doi.org/10.1117/12.2014508
Event: Seventeenth International School on Quantum Electronics: Laser Physics and Applications, 2012, Nessebar, Bulgaria
Abstract
Stretching of laser pulses allows to improve eximer laser output characteristics and to prolong a laser lifetime. Two methods of laser pumping are proposed in this paper for stretching of laser pulses. Using a special electric circuit in a pumping generator scheme allowed to double a pulse duration for a small ArF-laser. For the first time a pumping mode with periodically damping voltage across a discharge gap was successfully realized for increasing of KrF-laser pulse duration.
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Ekaterina A. Shershunova, Maxim V. Malashin, Sergey I. Moshkunov, Vladimir A. Yamschikov, Vladislav Yu. Khomich, "Two methods of pumping for eximer laser pulse-stretching", Proc. SPIE 8770, 17th International School on Quantum Electronics: Laser Physics and Applications, 87700C (15 March 2013); doi: 10.1117/12.2014508; https://doi.org/10.1117/12.2014508
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