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6 May 2013 Metamaterial fishnet structure formed from nanoimprint lithography
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We report on the fabrication and characterisation of fishnet structures of various dimensions on a polymer layer. The fabrication process causes metal-dielectric-metal rectangular pillars to be compressed to the bottom of fishnet structures. The metamaterial structures are fabricated using nanoimprint lithography, allowing large areas to be patterned quickly and good reproducibility through multiple use of the nanoimprint stamp. A tri-layer comprising of silver (Ag) and magnesium fluoride (MgF2) was deposited on a thick polymer layer, in this instance PMMA, before being directly imprinted by a stamp. When the metal-dielectric layered pillars are imprinted to a sufficient depth in the PMMA below the fishnet, distinct resonance peaks can be measured at both visible and near-infrared frequencies. The precise wavelength of the resonant peak at near-infrared and its Q-factor can be changed by altering the physical dimensions and number of metal and dielectric layers of the fishnet respectively. The response viewed at visible frequencies is due to the pillars that sit in the PMMA, below the fishnet. Silver and magnesium fluoride layers that comprise the suppressed pillars are crushed during the imprinting process but still allow for light to be transmitted. Despite imprinting directly into multiple metal and dielectric layers, high quality structures are observed with a minimum feature size as low as 200 nm. Resonance peaks are measured experimentally in reflectance using an FTIR spectrometer with a calcium fluoride (CaF2) beam-splitter and a visible wavelength range spectrometer with a silicon (Si) detector.
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Graham J. Sharp, Murat Yuce, Xiaolon Hu, Mantana Sinworapun, Ali Z Khokhar, and Nigel P. Johnson "Metamaterial fishnet structure formed from nanoimprint lithography", Proc. SPIE 8771, Metamaterials VIII, 87710Y (6 May 2013);

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