3 May 2013 Holographic nanointerferometer with digital magnification
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Abstract
The method of holographic interferometry with the increased sensitivity was applied for measurements of height of nano-steps (from 10 nm and higher) with standard uncertainty about 0.5 nm. The increasing of sensitivity is obtained by interference of waves with mutually complex conjugated phases.
© (2013) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
S. A. Pulkin, S. A. Pulkin, V. Yu. Venediktov, V. Yu. Venediktov, V. Ivanov, V. Ivanov, V. I. Korotkov, V. I. Korotkov, N. I. Matveyeva, N. I. Matveyeva, A. V. Panova, A. V. Panova, I. M. Pasechnik, I. M. Pasechnik, A. A. Sevrygin, A. A. Sevrygin, M. A. Solov’ev, M. A. Solov’ev, } "Holographic nanointerferometer with digital magnification", Proc. SPIE 8776, Holography: Advances and Modern Trends III, 87760C (3 May 2013); doi: 10.1117/12.2016853; https://doi.org/10.1117/12.2016853
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