Application of EUV optics to surface modification of materials

O. Frolov; K. Kolacek; J. Straus; J. Schmidt; V. Prukner; A. Choukourov

doi:10.1117/12.2020158

3 May 2013 Application of EUV optics to surface modification of materials

O. Frolov, K. Kolacek, J. Straus, J. Schmidt, V. Prukner, A. Choukourov

Author Affiliations +

Proceedings Volume 8777, Damage to VUV, EUV, and X-ray Optics IV; and EUV and X-ray Optics: Synergy between Laboratory and Space III; 877707 (2013) https://doi.org/10.1117/12.2020158
Event: SPIE Optics + Optoelectronics, 2013, Prague, Czech Republic

Abstract

We report results of experiments connected with surface modification of materials with an intense extreme ultraviolet (EUV) laser beam. Irradiated by the laser beam from a discharge-plasma EUV source (with wavelength of 46.9 nm) based on a high-current capillary discharge driver, the samples have been investigated by atomic-force microscope (AFM). The laser beam is focused with a spherical Si/Sc multilayer-coated mirror on polymethylmethacrylate (PMMA), gold-covered- PMMA and gallium arsenide (GaAs) samples. It turned out that desorption and ablation regimes, which are observed in all these cases strongly depends on substrate materials.

Citation Download Citation

O. Frolov, O. Frolov, K. Kolacek, K. Kolacek, J. Straus, J. Straus, J. Schmidt, J. Schmidt, V. Prukner, V. Prukner, A. Choukourov, A. Choukourov, "Application of EUV optics to surface modification of materials", Proc. SPIE 8777, Damage to VUV, EUV, and X-ray Optics IV; and EUV and X-ray Optics: Synergy between Laboratory and Space III, 877707 (3 May 2013); doi: 10.1117/12.2020158; https://doi.org/10.1117/12.2020158

ACCESS THE FULL ARTICLE

PERSONAL SIGN IN
Full access may be available with your subscription

Email or Username Forgot your username?

Password Forgot your password?

Show

Remember Email/Username on this computer

Remember Password

No SPIE account? Create an account
or Institutional Sign In via Shibboleth

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available

Members: $14.40

Non-members: $18.00 ADD TO CART

Show All Keywords

Keywords/Phrases

Search In:

Publication Years