24 January 2013 Crystallization behavior of Ge2Te3-TiO2 film for phase-change random access memory application
Author Affiliations +
Proceedings Volume 8782, 2012 International Workshop on Information Storage and Ninth International Symposium on Optical Storage; 87820K (2013) https://doi.org/10.1117/12.2018637
Event: 2012 International Workshop on Information Data Storage and Ninth International Symposium on Optical Storage, 2012, Shanghai, China
Abstract
Crystallization behavior of the Ge2Te3-TiO2 films prepared by the co-sputtering using Ge2Te3 and TiO2 targets was investigated by in situ resistance-temperature measurement and transmission electron microscopy. The crystallization kinetic parameters including rate factor and kinetics exponent were obtained by the non-isothermal change in resistance using Kissinger’s plot and Ozawa’s method. The average kinetics exponent was estimated by the nonisothermal change in resistance. Compared with other studied compositions, the composition with TiO2 concentration of 5 at.% exhibited shorter crystallization time which was calculated by the Johnson-Mehl-Avrami equation. The crystallization behavior of Ge2Te3-TiO2 film was verified by the transition electron microscopy at different annealing temperature. With the short crystallization time and high crystallization temperature, the compositions with TiO2 concentration of 5-15 at.% may be one of the competing candidates for phase change memory application.
© (2013) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Yegang Lu, Yegang Lu, Sannian Song, Sannian Song, Zhitang Song, Zhitang Song, Yan Cheng, Yan Cheng, Liangcai Wu, Liangcai Wu, Bo Liu, Bo Liu, } "Crystallization behavior of Ge2Te3-TiO2 film for phase-change random access memory application", Proc. SPIE 8782, 2012 International Workshop on Information Storage and Ninth International Symposium on Optical Storage, 87820K (24 January 2013); doi: 10.1117/12.2018637; https://doi.org/10.1117/12.2018637
PROCEEDINGS
6 PAGES


SHARE
Back to Top