Morphologic evaluation of thin films by algorithms of optical phase stepping applied to images obtained by interferential microscopy

Valentin Sarmiento; Miguel Asmad; J. Ivan Choque; Guillermo Baldwin

doi:10.1117/12.2025981

18 November 2013 Morphologic evaluation of thin films by algorithms of optical phase stepping applied to images obtained by interferential microscopy

Valentin Sarmiento, Miguel Asmad, J. Ivan Choque, Guillermo Baldwin

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Proceedings Volume 8785, 8th Iberoamerican Optics Meeting and 11th Latin American Meeting on Optics, Lasers, and Applications; 87856U (2013) https://doi.org/10.1117/12.2025981
Event: 8th Ibero American Optics Meeting/11th Latin American Meeting on Optics, Lasers, and Applications, 2013, Porto, Portugal

Abstract

The characterization of the superficial topography of a thin film, obtained from an interferometer installed in our Optics Laboratory, is done using bi-dimensional images of its surface overlaid with interference fringes (interferogram¹). These images differ among them only by a constant variation of the optical phase². The total number of images to acquire depends on the image processing algorithm to apply; this algorithm allows to determine the value of the phase introduced by the surface form.

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Valentin Sarmiento, Miguel Asmad, J. Ivan Choque, and Guillermo Baldwin "Morphologic evaluation of thin films by algorithms of optical phase stepping applied to images obtained by interferential microscopy", Proc. SPIE 8785, 8th Iberoamerican Optics Meeting and 11th Latin American Meeting on Optics, Lasers, and Applications, 87856U (18 November 2013); https://doi.org/10.1117/12.2025981

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KEYWORDS

Thin films

Transducers

Microscopy

Calibration

Image processing

Interferometers

Interferometry

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