18 November 2013 Morphologic evaluation of thin films by algorithms of optical phase stepping applied to images obtained by interferential microscopy
Author Affiliations +
Proceedings Volume 8785, 8th Iberoamerican Optics Meeting and 11th Latin American Meeting on Optics, Lasers, and Applications; 87856U (2013) https://doi.org/10.1117/12.2025981
Event: 8th Ibero American Optics Meeting/11th Latin American Meeting on Optics, Lasers, and Applications, 2013, Porto, Portugal
Abstract
The characterization of the superficial topography of a thin film, obtained from an interferometer installed in our Optics Laboratory, is done using bi-dimensional images of its surface overlaid with interference fringes (interferogram1). These images differ among them only by a constant variation of the optical phase2. The total number of images to acquire depends on the image processing algorithm to apply; this algorithm allows to determine the value of the phase introduced by the surface form.
© (2013) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Valentin Sarmiento, Miguel Asmad, J. Ivan Choque, Guillermo Baldwin, "Morphologic evaluation of thin films by algorithms of optical phase stepping applied to images obtained by interferential microscopy", Proc. SPIE 8785, 8th Iberoamerican Optics Meeting and 11th Latin American Meeting on Optics, Lasers, and Applications, 87856U (18 November 2013); doi: 10.1117/12.2025981; https://doi.org/10.1117/12.2025981
PROCEEDINGS
5 PAGES


SHARE
Back to Top