Optical waveguides formed by carbon implantation on SiO2

Erick Flores-Romero; José M. Zarate-Reyes; Héctor Silva-Pereyra; Alicia Oliver; Luis Rodríguez-Fernández

doi:10.1117/12.2021719

18 November 2013 Optical waveguides formed by carbon implantation on SiO₂

Erick Flores-Romero, José M. Zarate-Reyes, Héctor Silva-Pereyra, Alicia Oliver, Luis Rodríguez-Fernández

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Proceedings Volume 8785, 8th Iberoamerican Optics Meeting and 11th Latin American Meeting on Optics, Lasers, and Applications; 8785AM (2013) https://doi.org/10.1117/12.2021719
Event: 8th Ibero American Optics Meeting/11th Latin American Meeting on Optics, Lasers, and Applications, 2013, Porto, Portugal

Abstract

The formation of planar optical waveguides by the implantation of carbon ions on fused quartz (SiO₂) is presented. The implantation was performed at normal incidence by carbon ions accelerated at energies between 3 – 9 MeV, varying the fluences from 1.0×10¹⁴ to 2.3×10¹⁶ ions/cm². The changes of the refractive index in the host were studied by the m-line method. With this method the effective refractive indices of the dark modes of the waveguides were measured, and then a refractive index profile was adjusted to fit the experimental indices. A refractive index enhancement was found in both regions dominated by the ion electronic stopping and nuclear stopping regimes. This indicates that the damage region created is surrounded by two zones with lower refractive index and can acts as a conventional planar optical waveguide. The dependence of the refractive index profiles respects to the implantation parameters like energy, fluence and current density, is also presented.

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Erick Flores-Romero, José M. Zarate-Reyes, Héctor Silva-Pereyra, Alicia Oliver, and Luis Rodríguez-Fernández "Optical waveguides formed by carbon implantation on SiO₂", Proc. SPIE 8785, 8th Iberoamerican Optics Meeting and 11th Latin American Meeting on Optics, Lasers, and Applications, 8785AM (18 November 2013); https://doi.org/10.1117/12.2021719

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KEYWORDS

Refractive index

Waveguides

Ions

Carbon

Fused quartz

Ion implantation

Silica

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