Laser-induced damage in porous glass: a pathway to 3D fabrication of micro-/nanofluidics

Ya Cheng; Yang Liao; Koji Sugioka

doi:10.1117/12.2020480

9 July 2013 Laser-induced damage in porous glass: a pathway to 3D fabrication of micro-/nanofluidics

Ya Cheng, Yang Liao, Koji Sugioka

Proceedings Volume 8786, Pacific Rim Laser Damage 2013: Optical Materials for High Power Lasers; 87860C (2013) https://doi.org/10.1117/12.2020480
Event: SPIE/SIOM Pacific Rim Laser Damage: Optical Materials for High-Power Lasers, 2013, Shanghai, China

Abstract

We report on controllable production of nanostructures embedded in a porous glass by femtosecond laser direct writing. We show that a hollow nano-void with a lateral size of ~40 nm and an axial size of ~1500 nm can be achieved by manipulating the peak intensity and polarization of the writing laser beam. The single nano-voids can be smoothly connected into a continuous nanochannel by water-assisted femtosecond laser direct writing. With this technique, integrated micro-nanofluidic systems have been achieved by simultaneously writing micro- and nanofluidic channels arranged into various 3D configurations in glass substrates. The fabricated micro- and nanofluidic systems have been applied to demonstrate DNA analysis, e. g., stretching of DNA molecules. Our technique offers new opportunities to develop novel 3D micro-nanofluidic systems for a variety of lab-on-a-chip applications.

Citation Download Citation

Ya Cheng, Yang Liao, and Koji Sugioka "Laser-induced damage in porous glass: a pathway to 3D fabrication of micro-/nanofluidics", Proc. SPIE 8786, Pacific Rim Laser Damage 2013: Optical Materials for High Power Lasers, 87860C (9 July 2013); https://doi.org/10.1117/12.2020480

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