9 July 2013 A new polishing process for large-aperture and high-precision aspheric surface
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Proceedings Volume 8786, Pacific Rim Laser Damage 2013: Optical Materials for High Power Lasers; 87860R (2013) https://doi.org/10.1117/12.2020992
Event: SPIE/SIOM Pacific Rim Laser Damage: Optical Materials for High-Power Lasers, 2013, Shanghai, China
Abstract
The high-precision aspheric surface is hard to be achieved due to the mid-spatial frequency error in the finishing step. The influence of mid-spatial frequency error is studied through the simulations and experiments. In this paper, a new polishing process based on magnetorheological finishing (MRF), smooth polishing (SP) and ion beam figuring (IBF) is proposed. A 400mm aperture parabolic surface is polished with this new process. The smooth polishing (SP) is applied after rough machining to control the MSF error. In the middle finishing step, most of low-spatial frequency error is removed by MRF rapidly, then the mid-spatial frequency error is restricted by SP, finally ion beam figuring is used to finish the surface. The surface accuracy is improved from the initial 37.691nm (rms, 95% aperture) to the final 4.195nm. The results show that the new polishing process is effective to manufacture large-aperture and high-precision aspheric surface.
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Xuqing Nie, Xuqing Nie, Shengyi Li, Shengyi Li, Yifan Dai, Yifan Dai, Ci Song, Ci Song, } "A new polishing process for large-aperture and high-precision aspheric surface", Proc. SPIE 8786, Pacific Rim Laser Damage 2013: Optical Materials for High Power Lasers, 87860R (9 July 2013); doi: 10.1117/12.2020992; https://doi.org/10.1117/12.2020992
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