You have requested a machine translation of selected content from our databases. This functionality is provided solely for your convenience and is in no way intended to replace human translation. Neither SPIE nor the owners and publishers of the content make, and they explicitly disclaim, any express or implied representations or warranties of any kind, including, without limitation, representations and warranties as to the functionality of the translation feature or the accuracy or completeness of the translations.
Translations are not retained in our system. Your use of this feature and the translations is subject to all use restrictions contained in the Terms and Conditions of Use of the SPIE website.
9 July 2013Using light scattering to investigate damage-relevant imperfections of surfaces, coatings, and bulk materials
Light scattering is one of the loss mechanisms of optical components. It is caused by intrinsic and extrinsic imperfections
such as roughness, index fluctuations, and bulk or surface defects that can all play critical roles for the laser stability of
optical components. Light scattering metrology has proven to be a versatile non-destructive technique to characterize
imperfections. Information can be retrieved with high sensitivity even over large areas. The total scatter levels or
scattering coefficients provide information about scatter losses whereas the angle resolved scattering provides detailed
information about the sources of scattering. An overview of the instruments developed at Fraunhofer IOF will be given
and a variety of examples of application will be discussed comprising roughness and defect maps of lithography optics,
investigations of bulk scattering of optical materials, and enhanced scattering through thickness errors of interference
coatings.
The alert did not successfully save. Please try again later.
Sven Schröder, Marcus Trost, Tobias Herffurth, Angela Duparré, "Using light scattering to investigate damage-relevant imperfections of surfaces, coatings, and bulk materials," Proc. SPIE 8786, Pacific Rim Laser Damage 2013: Optical Materials for High Power Lasers, 87860S (9 July 2013); https://doi.org/10.1117/12.2020478