9 July 2013 Research on microcracks avoidance in processing of α-Al2O3 by ultrashort laser pulses
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Proceedings Volume 8786, Pacific Rim Laser Damage 2013: Optical Materials for High Power Lasers; 878623 (2013) https://doi.org/10.1117/12.2020373
Event: SPIE/SIOM Pacific Rim Laser Damage: Optical Materials for High-Power Lasers, 2013, Shanghai, China
Abstract
The optical crystal α-Al2O3 has been widely used as the matrix of ruby and blue sapphire for its wide transparency, high thermal conductivity, big scale and low cost. α-Al2O3 is so hard that cutter is easily abraded. Micromachining of α-Al2O3 by ultrashort pulsed laser is superior to the traditional mechanical approach as its non-contact and cold machining features. However, unexpected cracks on the surface of α-Al2O3 are observed after femtosecond laser machining. In order to hinder the crack source from stretching, we optimize the laser parameters accompanied with annealing. The crack-free machining can be achieved. Three-dimensional α-Al2O3 microstructures free from fracture, such as cylinder, barrel and sphere are demonstrated.
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Cheng-Wei Wang, Cheng-Wei Wang, Quan-Zhong Zhao, Quan-Zhong Zhao, } "Research on microcracks avoidance in processing of α-Al2O3 by ultrashort laser pulses", Proc. SPIE 8786, Pacific Rim Laser Damage 2013: Optical Materials for High Power Lasers, 878623 (9 July 2013); doi: 10.1117/12.2020373; https://doi.org/10.1117/12.2020373
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