13 May 2013 Optical characterization method for very small microlenses (sub-50 micron) for industrial mass-production applications
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Abstract
We present several characterization techniques, which are suitable for small-size microlenses of lens diameters down to 5 μm. For an individual microlens, we apply full characterization for optical performance and surface characteristics. First, the optical performance is characterized by using a high-resolution interference microscope (HRIM). Second, a confocal microscope is applied to investigate the surface parameters. Third, the HRIM allows scanning the microlens array along the optical axis by using a piezo actuator. This leads to a measurement of the 3D intensity distribution near the focus of the lens. Such 3D intensity maps allow us to characterize the focal properties of each lens in an array. By studying those characterization techniques, we develop a new method to characterize a large number of microlenses, for instance, over one million lenses, which is already applied to wafer-based manufacturing in a cleanroom fab.
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Myun-Sik Kim, Myun-Sik Kim, Jonathan Sunarjo, Jonathan Sunarjo, Kenneth J. Weible, Kenneth J. Weible, Reinhard Voelkel, Reinhard Voelkel, } "Optical characterization method for very small microlenses (sub-50 micron) for industrial mass-production applications", Proc. SPIE 8788, Optical Measurement Systems for Industrial Inspection VIII, 87880G (13 May 2013); doi: 10.1117/12.2020589; https://doi.org/10.1117/12.2020589
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