13 May 2013 High speed measurement of specular surfaces based on carrier fringe patterns in a line scan Michelson interferometer setup
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Abstract
For sub-micrometer measurements of large objects a setup is presented utilizing a line-scan camera for data acquisition with a Michelson interferometer. To extract height information a carrier fringe approach is used in combination with a linear axis moving the specimen. This technique provides the capability of quick measurements for large areas. For the estimation of the maximum acceptable scan speed the deviation of the linear axis from ideal movement is determined. Also a suitable choice for a light source is presented. Measurement capabilities are approved by reference measurements on a sinusoidal standard.
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Holger Knell, Holger Knell, Peter Lehmann, Peter Lehmann, "High speed measurement of specular surfaces based on carrier fringe patterns in a line scan Michelson interferometer setup", Proc. SPIE 8788, Optical Measurement Systems for Industrial Inspection VIII, 87880R (13 May 2013); doi: 10.1117/12.2020121; https://doi.org/10.1117/12.2020121
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