13 May 2013 Deflectometry vs. interferometry
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Abstract
Quantitative deflectometry is a new tool to measure specular surfaces. The spectrum of measurable surfaces ranges from flat to freeform surfaces with steep slopes, with a size ranging from millimeters to several meters. We illustrate this by several applications: eye glass measurements, measurements of big mirrors, and in-line measurements in ultra-precision manufacturing without unclamping of the sample. We describe important properties of deflectometry and compare its potentials and limitations with interferometry. We discuss which method is superior for which application and how the potential of deflectometry may be developing in the future.
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Gerd Häusler, Gerd Häusler, Christian Faber, Christian Faber, Evelyn Olesch, Evelyn Olesch, Svenja Ettl, Svenja Ettl, } "Deflectometry vs. interferometry", Proc. SPIE 8788, Optical Measurement Systems for Industrial Inspection VIII, 87881C (13 May 2013); doi: 10.1117/12.2020578; https://doi.org/10.1117/12.2020578
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