13 May 2013 Moiré deflectometry under incoherent illumination: 3D profiler for specular surfaces
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Abstract
We present a novel method for measuring a curved specular surface profile, which is the moiré deflectometry under incoherent (white light) illumination. In our proposed system, moiré is produced by a superposition of two pairs of Ronchi gratings to obtain orthogonal components of a normal vector on a surface under test. The grating pair was moved along an axis perpendicular to the grating plane to modulate a spatial frequency of the moiré. The moiré is reflected by a specular object, then observed with a calibrated stereo camera. Normal vector distribution of the tested surface was measured by analysis of intensity oscillations captured by the stereo camera as a function of the position of the moved grating. A surface profile was reconstructed by an integration calculation. We successfully measured surface profiles of deeply curved mirrors with the curvature from -20 to 20 m-1 by our system. Moreover, part of a miniature vehicle body, which has a complex curved specular surface, was also measured. Additionally, we theoretically and experimentally studied a measurable angle variation of the normal vector on the tested surface by our measurement system. We found that our system can allow to measure the angle deviation of 0.05 deg of the normal vector. This method has no ambiguity of slope and height measurements which is appeared in conventional deflectmetric metrologies. Furthermore, our proposed system only needs a single step calibration. Hence, the methodology we proposed has a potential to be developed into a 3D profiler for complex specular surfaces.
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Tomohiro Hirose, Tsunaji Kitayama, "Moiré deflectometry under incoherent illumination: 3D profiler for specular surfaces", Proc. SPIE 8788, Optical Measurement Systems for Industrial Inspection VIII, 87881G (13 May 2013); doi: 10.1117/12.2014630; https://doi.org/10.1117/12.2014630
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