13 May 2013 Absolute scale-based imaging position encoder with submicron accuracy
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Abstract
Study is devoted to experimental research and development of absolute imaging position encoder based on standard calibrated scale of invar alloy with 1 mm spacing. The encoder uses designed imaging system as a vernier and absolute magnetic encoder as a rough indication. The features of optical design, choice and use of imaging system as long as indexes images processing algorithm are described. A shadow method was implemented: indexes images on a CCD array are formed by the lens focused at the scale surface; the laser module lights up the scale through a beam-splitting prism by a parallel beam. Further dark indexes images on a light scale background are detected and analyzed to estimate the encoder position. Full range of experimental tests was set to calibrate the encoder and to estimate the accuracy. As a result, accuracy close to 1 μm at 1 m was achieved.
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Andrey G. Anisimov, Andrey G. Anisimov, Anton V. Pantyushin, Anton V. Pantyushin, Oleg U. Lashmanov, Oleg U. Lashmanov, A. S. Vasilev, A. S. Vasilev, Alexander N. Timofeev, Alexander N. Timofeev, Valery V. Korotaev, Valery V. Korotaev, Sergey V. Gordeev, Sergey V. Gordeev, } "Absolute scale-based imaging position encoder with submicron accuracy", Proc. SPIE 8788, Optical Measurement Systems for Industrial Inspection VIII, 87882T (13 May 2013); doi: 10.1117/12.2021022; https://doi.org/10.1117/12.2021022
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