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13 May 2013 Design and experiment of testing an off-axis aspheric surface by computer generated hologram
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Abstract
To test an off-axis aspheric surface in high precision, a multiple combined computer generated hologram (CGH) is designed and fabrication. Multiple combined CGH which is a hologram including different areas with different purposes can not only measure off-axis aspheric surface, but also align every element in test system. The design methods of test CGH and alignment CGH were deduced in detail. Ray trace and B-spline were used to devise test CGH, reflection CGH was used to align interferometer and CGH, and hologram alignment mark was used to align CGH and off-axis aspheric surface. A design example was given to test an off-axis paraboloid with 50mm aperture and 35mm off-axis distance. Meanwhile, this CGH was fabricated and this paraboloid was measured by it. The test result (PV=0.305λ,RMS=0.042λ) is matched well with the outcome verified by autocollimation (PV=0.320λ,RMS=0.043λ). At last, we analyzed and solved the noise in the CGH test result. It proves that these designs are correct and this method can test off-axis aspheric surface in high precision.
© (2013) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Shijie Li, Fan Wu, Qiang Chen, Bin Fan, and Lianghong Li "Design and experiment of testing an off-axis aspheric surface by computer generated hologram", Proc. SPIE 8788, Optical Measurement Systems for Industrial Inspection VIII, 878833 (13 May 2013); https://doi.org/10.1117/12.2019345
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