13 May 2013 Numerical investigations of the influence of different commonly applied approximations in scatterometry
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Abstract
At PTB we investigate the prospects of scatterometric methods for quantitative dimensional metrology of periodic micro- and nanostructures. Commonly applied approximations and simplifications may lead to contributions to the measurement uncertainty or even to systematic measurement errors. Here we present a short overview about the main effects connected with these simplifications. In particular we present numerical investigations of the influence of a finite beam size on the scatterometry results. The results indicate, that an impact of the finite beam size becomes significant only for tightly focused beams with a beam waist radius wo smaller than 10 μm.
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J. Endres, J. Endres, S. Burger, S. Burger, M. Wurm, M. Wurm, B. Bodermann, B. Bodermann, } "Numerical investigations of the influence of different commonly applied approximations in scatterometry", Proc. SPIE 8789, Modeling Aspects in Optical Metrology IV, 878904 (13 May 2013); doi: 10.1117/12.2022108; https://doi.org/10.1117/12.2022108
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