Alternative methods for uncertainty evaluation in EUV scatterometry

Sebastian Heidenreich; Mark-Alexander Henn; Hermann Gross; Bernd Bodermann; Markus Bär

doi:10.1117/12.2020677

13 May 2013 Alternative methods for uncertainty evaluation in EUV scatterometry

Sebastian Heidenreich, Mark-Alexander Henn, Hermann Gross, Bernd Bodermann, Markus Bär

Proceedings Volume 8789, Modeling Aspects in Optical Metrology IV; 87890T (2013) https://doi.org/10.1117/12.2020677
Event: SPIE Optical Metrology 2013, 2013, Munich, Germany

Abstract

The precise and accurate determination of critical dimensions of photo masks and their uncertainties is important in the lithographic process to ensure operational reliability of electronic compounds. Scatterometry is known as a fast, non-destructive optical method for the indirect determination of geometry parameters. In recent years novel methods for solving the inverse problem of scatterometry have enabled a more reliable determination of grating parameters. In this article we present results from maximum likelihood parameter estimations based on numerically simulated EUV scatterometry data. We approximately determine uncertainties of these parameters by a Monte Carlo method with a limited amount of samplings and by employing the Fisher information matrix. Furthermore, we demonstrate that the use of incomplete mathematical models may lead to severe distortions in the calculations of the uncertainties by the approximate Fisher matrix approach as well as to substantially larger uncertainties for the Monte Carlo method.

Citation Download Citation

Sebastian Heidenreich, Mark-Alexander Henn, Hermann Gross, Bernd Bodermann, and Markus Bär "Alternative methods for uncertainty evaluation in EUV scatterometry", Proc. SPIE 8789, Modeling Aspects in Optical Metrology IV, 87890T (13 May 2013); https://doi.org/10.1117/12.2020677

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