13 May 2013 EFPI signal processing method providing picometer-level resolution in cavity length measurement
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Abstract
In the current article an advanced method of EFPI baseline measurement by use of spectral function approximation is proposed. The method provides an increase in EFPI baseline measurement precision and computational acceleration. The method bases on two foundations provided by analysis of low-finesse Fabry-Perot interferometer model: reduction of search domain and taking into account the most informative spectral intervals, providing a greater impact on the residual of measured and theoretical EFPI spectral functions. Proposed signal processing method resulted in the EFPI baseline measurement resolution less than 50 pm for the cavity length values between 20 and 700 μm.
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Nikolai Ushakov, Nikolai Ushakov, Leonid Liokumovich, Leonid Liokumovich, Andrey Medvedev, Andrey Medvedev, } "EFPI signal processing method providing picometer-level resolution in cavity length measurement", Proc. SPIE 8789, Modeling Aspects in Optical Metrology IV, 87890Y (13 May 2013); doi: 10.1117/12.2020255; https://doi.org/10.1117/12.2020255
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