Absolute testing of flats with all terms by using even and odd functions

Xin Jia; Fuchao Xu; Tingwen Xing; Zhixiang Liu

doi:10.1117/12.2019722

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13 May 2013 Absolute testing of flats with all terms by using even and odd functions

Xin Jia, Fuchao Xu, Tingwen Xing, Zhixiang Liu

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Proceedings Volume 8789, Modeling Aspects in Optical Metrology IV; 878911 (2013) https://doi.org/10.1117/12.2019722
Event: SPIE Optical Metrology 2013, 2013, Munich, Germany

Abstract

In Cartesian coordinate system, a flat can be expressed as the sum of even-odd, odd-even, even-even and oddodd functions. In the traditional three-flat even and odd function method, odd-odd function is difficult to obtain. In our paper the odd-odd function can be solved by use the Dove prism which can rotate the optical axis. The odd-odd function can calculate exactly. The even-odd, odd-even, even-even can be solved by rotating the flat 180°like the traditional method. Only five configurations are used to test the flats. The theoretical derivation and analysis are presented.

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Xin Jia, Fuchao Xu, Tingwen Xing, and Zhixiang Liu "Absolute testing of flats with all terms by using even and odd functions", Proc. SPIE 8789, Modeling Aspects in Optical Metrology IV, 878911 (13 May 2013); https://doi.org/10.1117/12.2019722

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