9 August 2013 Sensors based on SAW and FBAR technologies
Author Affiliations +
Proceedings Volume 8793, Fourth International Conference on Smart Materials and Nanotechnology in Engineering; 879308 (2013) https://doi.org/10.1117/12.2022205
Event: Fourth International Conference on Smart Materials and Nanotechnology in Engineering, 2013, Gold Coast, Australia
Abstract
Over the last few years a number of sensing platforms are being investigated for their use in drug development, microanalysis or medical diagnosis. Lab-on-a-chip (LOC) are devices integrating more than one laboratory functions on a single device chip of a very small size, and typically consist of two main components: microfluidic handling systems and sensors. The physical mechanisms that are generally used for microfluidics and sensors are different, hence making the integration of these components difficult and costly. In this work we present a lab-on-a-chip system based on surface acoustic waves (for fluid manipulation) and film bulk acoustic resonators (for sensing). Coupling surface acoustic waves into liquids induces acoustic streaming and motion of micro-droplets, whilst it is well-known that bulk acoustic waves can be used to fabricate microgravimetric sensors. Both technologies offer exceptional sensitivity and can be fabricated from piezoelectric thin films deposited on Si substrates, reducing the fabrication time/cost of the LOC devices.
© (2013) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
L. García-Gancedo, L. García-Gancedo, W. I. Milne, W. I. Milne, J. K. Luo, J. K. Luo, A. J. Flewitt, A. J. Flewitt, "Sensors based on SAW and FBAR technologies", Proc. SPIE 8793, Fourth International Conference on Smart Materials and Nanotechnology in Engineering, 879308 (9 August 2013); doi: 10.1117/12.2022205; https://doi.org/10.1117/12.2022205
PROCEEDINGS
7 PAGES


SHARE
RELATED CONTENT

Optical transmission of ZnO thin films
Proceedings of SPIE (July 01 1998)
Flexural plate wave devices for biosensor platform
Proceedings of SPIE (May 02 2007)
Thin film resonators for TNT vapor detection
Proceedings of SPIE (September 03 1998)
Micromachined piezoelectric resonator at MHz application
Proceedings of SPIE (March 30 2006)
Effects of Ti addiction in WO3 thin film ammonia gas...
Proceedings of SPIE (October 27 2006)

Back to Top