20 May 2013 Focussed ion beam machining of an in-fibre 45° mirror for fibre end sensors
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Proceedings Volume 8794, Fifth European Workshop on Optical Fibre Sensors; 879404 (2013) https://doi.org/10.1117/12.2025714
Event: Fifth European Workshop on Optical Fibre Sensors, 2013, Krakow, Poland
Abstract
Focussed Ion Beam (FIB) machining has been demonstrated to be capable of fabricating nano and micro-structure elements. In this paper we demonstrate techniques to design and fabricate a 45° mirror on the end of both conventional single mode and multi-core fibres (MCF) using FIB processing. The mirror is finished by a two step process: first a scanning process is used to make a rough cut followed by a polishing process to create an optical surface finish. The machined 45° mirror can be accurately aligned with optical fibre core, which avoids issues associated with the alignment of external turning mirror components. Proof-of-concept tests demonstrate that the fabricated structure is capable of measuring two axis displacements interferometrically with a maximum displacement up to 1.0mm and an rms error of ~50nm.
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J. Li, J. N. Sun, M. M. Miliar, J. M. Ritchie, X. Luo, R. R. J. Maier, D. P. Hand, W. N. MacPherson, "Focussed ion beam machining of an in-fibre 45° mirror for fibre end sensors", Proc. SPIE 8794, Fifth European Workshop on Optical Fibre Sensors, 879404 (20 May 2013); doi: 10.1117/12.2025714; https://doi.org/10.1117/12.2025714
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