16 May 2013 Overview on the high power excimer laser technology
Author Affiliations +
Proceedings Volume 8796, 2nd International Symposium on Laser Interaction with Matter (LIMIS 2012); 87961L (2013) https://doi.org/10.1117/12.2011186
Event: 2nd International Symposium on Laser Interaction with Matter (LIMIS 2012), 2012, Xi'an, Shaanxi, China
Abstract
High power excimer laser has essential applications in the fields of high energy density physics, inertial fusion energy and industry owing to its advantages such as short wavelength, high gain, wide bandwidth, energy scalable and repetition operating ability. This overview is aimed at an introduction and evaluation of enormous endeavor of the international high power excimer laser community in the last 30 years. The main technologies of high power excimer laser are reviewed, which include the pumping source technology, angular multiplexing and pulse compressing, beam-smoothing and homogenous irradiation, high efficiency and repetitive operation et al. A high power XeCl laser system developed in NINT of China is described in detail.
© (2013) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Jingru Liu, "Overview on the high power excimer laser technology", Proc. SPIE 8796, 2nd International Symposium on Laser Interaction with Matter (LIMIS 2012), 87961L (16 May 2013); doi: 10.1117/12.2011186; https://doi.org/10.1117/12.2011186
PROCEEDINGS
8 PAGES


SHARE
RELATED CONTENT

Progress on high power excimer laser in NINT
Proceedings of SPIE (February 03 2015)
Progress on a short pulse excimer laser system with beam...
Proceedings of SPIE (January 30 2013)
Experimental study on a long-pulse excimer laser system
Proceedings of SPIE (January 26 2005)
Review of high-power excimer lasers
Proceedings of SPIE (June 01 1990)

Back to Top