A New Automatic Ellipsometer

Grant M. Miles

doi:10.1117/12.955008

22 October 1976 A New Automatic Ellipsometer

Grant M. Miles

Proceedings Volume 0088, Polarized Light: Instruments, Devices, Applications; (1976) https://doi.org/10.1117/12.955008
Event: 20th Annual Technical Symposium, 1976, San Diego, United States

Abstract

The design and performance of a new automatic ellipsometer is described. The instrument is of the balancing or null-seeking type, using Faraday modulators to detect out-of-balance conditions, stepper motors to drive the polarizing and analyzing prisms, and Moire fringe counters to measure the angles of the prisms.

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Grant M. Miles "A New Automatic Ellipsometer", Proc. SPIE 0088, Polarized Light: Instruments, Devices, Applications, (22 October 1976); https://doi.org/10.1117/12.955008

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KEYWORDS

Modulators

Prisms

Moire patterns

Photomultipliers

Polarizers

Lamps

Statistical analysis

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