12 September 2013 A modular assembling platform for manufacturing of microsystems by optical tweezers
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Abstract
Due to the increased complexity in terms of materials and geometries for microsystems new assembling techniques are required. Assembling techniques from the semiconductor industry are often very specific and cannot fulfill all specifications in more complex microsystems. Therefore, holographic optical tweezers are applied to manipulate structures in micrometer range with highest flexibility and precision. As is well known non-spherical assemblies can be trapped and controlled by laser light and assembled with an additional light modulator application, where the incident laser beam is rearranged into flexible light patterns in order to generate multiple spots. The complementary building blocks are generated by a two-photon-polymerization process. The possibilities of manufacturing arbitrary microstructures and the potential of optical tweezers lead to the idea of combining manufacturing techniques with manipulation processes to “microrobotic” processes. This work presents the manipulation of generated complex microstructures with optical tools as well as a storage solution for 2PP assemblies. A sample holder has been developed for the manual feeding of 2PP building blocks. Furthermore, a modular assembling platform has been constructed for an ‘all-in-one’ 2PP manufacturing process as a dedicated storage system. The long-term objective is the automation process of feeding and storage of several different 2PP micro-assemblies to realize an automated assembly process.
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Sarah Isabelle Ksouri, Sarah Isabelle Ksouri, Andreas Aumann, Andreas Aumann, Reza Ghadiri, Reza Ghadiri, Michael Prüfer, Michael Prüfer, Sebastian Baer, Sebastian Baer, Andreas Ostendorf, Andreas Ostendorf, } "A modular assembling platform for manufacturing of microsystems by optical tweezers ", Proc. SPIE 8810, Optical Trapping and Optical Micromanipulation X, 881028 (12 September 2013); doi: 10.1117/12.2025273; https://doi.org/10.1117/12.2025273
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