Design and fabrication of silicon-based optofluidic waveguide platforms

Lynnell U. Zempoaltecatl; Holger Schmidt; Aaron R. Hawkins

doi:10.1117/12.2028186

11 September 2013 Design and fabrication of silicon-based optofluidic waveguide platforms

Lynnell U. Zempoaltecatl, Holger Schmidt, Aaron R. Hawkins

Proceedings Volume 8812, Biosensing and Nanomedicine VI; 88120U (2013) https://doi.org/10.1117/12.2028186
Event: SPIE NanoScience + Engineering, 2013, San Diego, California, United States

Abstract

Using silicon based microfabrication and materials we have developed a photonic platform capable of single bioparticle analysis. This platform combines liquid and hollow core waveguides on the micron-scale (5 μm x 12 μm) to isolate femtoliter sized sample volumes. Fluorescence excitation and signals in the visible range are directed into and out of the sample volume at an orthogonal angle to maximize signal-to-noise. This paper reveals the development path of these structures over several device generations including innovations in material, geometries, and fabrication techniques to increase detection sensitivity.

Citation Download Citation

Lynnell U. Zempoaltecatl, Holger Schmidt, and Aaron R. Hawkins "Design and fabrication of silicon-based optofluidic waveguide platforms", Proc. SPIE 8812, Biosensing and Nanomedicine VI, 88120U (11 September 2013); https://doi.org/10.1117/12.2028186

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