11 September 2013 Design and fabrication of silicon-based optofluidic waveguide platforms
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Using silicon based microfabrication and materials we have developed a photonic platform capable of single bioparticle analysis. This platform combines liquid and hollow core waveguides on the micron-scale (5 μm x 12 μm) to isolate femtoliter sized sample volumes. Fluorescence excitation and signals in the visible range are directed into and out of the sample volume at an orthogonal angle to maximize signal-to-noise. This paper reveals the development path of these structures over several device generations including innovations in material, geometries, and fabrication techniques to increase detection sensitivity.
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Lynnell U. Zempoaltecatl, Lynnell U. Zempoaltecatl, Holger Schmidt, Holger Schmidt, Aaron R. Hawkins, Aaron R. Hawkins, } "Design and fabrication of silicon-based optofluidic waveguide platforms", Proc. SPIE 8812, Biosensing and Nanomedicine VI, 88120U (11 September 2013); doi: 10.1117/12.2028186; https://doi.org/10.1117/12.2028186


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