Abstract
This PDF file contains the front matter associated with SPIE Proceedings Volume 8819, including the Title Page, Copyright Information, Table of Contents, and the Conference Committee listing.
© (2013) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
} "Front Matter: Volume 8819", Proc. SPIE 8819, Instrumentation, Metrology, and Standards for Nanomanufacturing, Optics, and Semiconductors VII, 881901 (25 September 2013); doi: 10.1117/12.2033971; https://doi.org/10.1117/12.2033971
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