Paper
11 September 2013 Surface photovoltage as a tool to monitor the effect of hydrogen treatment on a-Si:H/c-Si heterojunction
L. Martini, L. Serenelli, R. Asquini, D. Caputo, G. de Cesare, M. Izzi, M. Tucci
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Abstract
The amorphous/crystalline silicon technology has demonstrated its potentiality leading to high efficiency solar cells. We propose the use of surface photovoltage technique as a contact-less tool for the evaluation of the energetic distribution of the state density at amorphous/crystalline silicon interface. We investigate the effect hydrogen plasma treatments performed on thin amorphous silicon buffer layer deposited over crystalline silicon surface and we compare its effect with that of thermal annealing on the interface. The surface photovoltage technique results to be very sensitive to the different experimental treatments, and therefore it can be considered a precious tool to monitor and improve the interface electronic quality.
© (2013) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
L. Martini, L. Serenelli, R. Asquini, D. Caputo, G. de Cesare, M. Izzi, and M. Tucci "Surface photovoltage as a tool to monitor the effect of hydrogen treatment on a-Si:H/c-Si heterojunction", Proc. SPIE 8823, Thin Film Solar Technology V, 88230U (11 September 2013); https://doi.org/10.1117/12.2024178
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Cited by 4 scholarly publications.
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KEYWORDS
Hydrogen

Annealing

Silicon

Plasma

Interfaces

Semiconductors

Heterojunctions

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