18 September 2013 Design considerations in a novel fiber-coupled three degree-of-freedom displacement interferometer
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Optomechanical design considerations are presented in the development of a fiber-delivered three degree-offreedom displacement measuring interferometer. The tool can be used to simultaneously calibrate the linear motion and rotational errors of a translating stage using a single measurement beam incident on a plane mirror target. This novel interferometer incorporates a quadrant photodiode to measure four spatially separated interference signals all within a single optical interference beam, otherwise known as differential wavefront sensing. In post processing, a weighted phase average is created over symmetrically adjacent pairings of detector elements to decouple and measure displacement and changes in pitch and yaw. Design considerations include a custom displacement interferometer architecture, mechanical analyses and qualification testing of a working prototype. This interferometer has the potential for providing multi-DOF calibrations for precision motion stages.
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Steven R. Gillmer, Steven R. Gillmer, Jonathan D. Ellis, Jonathan D. Ellis, } "Design considerations in a novel fiber-coupled three degree-of-freedom displacement interferometer", Proc. SPIE 8836, Optomechanical Engineering 2013, 883604 (18 September 2013); doi: 10.1117/12.2023358; https://doi.org/10.1117/12.2023358


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