18 September 2013 Design considerations in a novel fiber-coupled three degree-of-freedom displacement interferometer
Author Affiliations +
Abstract
Optomechanical design considerations are presented in the development of a fiber-delivered three degree-offreedom displacement measuring interferometer. The tool can be used to simultaneously calibrate the linear motion and rotational errors of a translating stage using a single measurement beam incident on a plane mirror target. This novel interferometer incorporates a quadrant photodiode to measure four spatially separated interference signals all within a single optical interference beam, otherwise known as differential wavefront sensing. In post processing, a weighted phase average is created over symmetrically adjacent pairings of detector elements to decouple and measure displacement and changes in pitch and yaw. Design considerations include a custom displacement interferometer architecture, mechanical analyses and qualification testing of a working prototype. This interferometer has the potential for providing multi-DOF calibrations for precision motion stages.
© (2013) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Steven R. Gillmer, Steven R. Gillmer, Jonathan D. Ellis, Jonathan D. Ellis, "Design considerations in a novel fiber-coupled three degree-of-freedom displacement interferometer", Proc. SPIE 8836, Optomechanical Engineering 2013, 883604 (18 September 2013); doi: 10.1117/12.2023358; https://doi.org/10.1117/12.2023358
PROCEEDINGS
9 PAGES


SHARE
RELATED CONTENT

Testing of aspheric surfaces
Proceedings of SPIE (November 08 2001)
Preparation of the calibration unit for LINC-NIRVANA
Proceedings of SPIE (July 27 2008)
The Gemini Planet Imager calibration testbed
Proceedings of SPIE (August 19 2009)
Palomar Testbed Interferometer
Proceedings of SPIE (July 23 1998)

Back to Top