Optomechanical design of a modular K-B mirror mount system for x-ray microfocusing at the advanced photon source

D. Shu; R. Harder; J. Almer; N. Kujala; S. Kearney; J. Anton; W. Liu; B. Lai; J. Maser; L. Finney; B. Shi; J. Qian; S. Marathe; A. Macrander; J. Tischler; S. Vogt; L. Assoufid

doi:10.1117/12.2023653

18 September 2013 Optomechanical design of a modular K-B mirror mount system for x-ray microfocusing at the advanced photon source

D. Shu, R. Harder, J. Almer, N. Kujala, S. Kearney, J. Anton, W. Liu, B. Lai, J. Maser, L. Finney, B. Shi, J. Qian, S. Marathe, A. Macrander, J. Tischler, S. Vogt, L. Assoufid

Author Affiliations +

Proceedings Volume 8836, Optomechanical Engineering 2013; 88360O (2013) https://doi.org/10.1117/12.2023653
Event: SPIE Optical Engineering + Applications, 2013, San Diego, California, United States

Abstract

Kirkpatrick-Baez (K-B) mirrors ^[1] are sophisticated x-ray micro- and nano-focusing tools for synchrotron radiation applications. A prototype of a modular x-ray K-B mirror mount system has been designed and tested at an optics testing beamline, 1-BM at the Advanced Photon Source (APS), Argonne National Laboratory (ANL). This compact, costeffective modular mirror mount system is designed to meet challenging mechanical and optical specifications for producing high positioning resolution and stability for various scientific applications with focused hard x-ray beams down to the 100-nanometer scale. The optomechanical design of the modular x-ray K-B mirror mount system as well as the preliminary test results of its precision positioning performance are presented in this paper.

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D. Shu, R. Harder, J. Almer, N. Kujala, S. Kearney, J. Anton, W. Liu, B. Lai, J. Maser, L. Finney, B. Shi, J. Qian, S. Marathe, A. Macrander, J. Tischler, S. Vogt, and L. Assoufid "Optomechanical design of a modular K-B mirror mount system for x-ray microfocusing at the advanced photon source", Proc. SPIE 8836, Optomechanical Engineering 2013, 88360O (18 September 2013); https://doi.org/10.1117/12.2023653

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