Novel rapid polishing process for fabrication of sapphire windows

Rajiv K. Singh; Arul Chakkaravarthi Arjunan; Kannan Balasundaram; Jinhyung Lee; George Ling; Deepika Singh

doi:10.1117/12.2024689

30 September 2013 Novel rapid polishing process for fabrication of sapphire windows

Rajiv K. Singh, Arul Chakkaravarthi Arjunan, Kannan Balasundaram, Jinhyung Lee, George Ling, Deepika Singh

Proceedings Volume 8837, Material Technologies and Applications to Optics, Structures, Components, and Sub-Systems; 88370T (2013) https://doi.org/10.1117/12.2024689
Event: SPIE Optical Engineering + Applications, 2013, San Diego, California, United States

Abstract

Sapphire is uniquely suitable for sensor windows of electro-optical systems due to its high transparency, high mechanical strength, and chemical inactivity. Unfortunately, these same characteristics also cause polishing of sapphire windows to be extremely difficult and slow. Hence the challenge is to develop a process for affordable production of large area sapphire windows with low-roughness, low-stress and without surface and subsurface damage. Here we report a novel rapid chemical mechanical polishing process that increases the material removal rate during polishing of sapphire by greater than twofold over conventional processes. Such a process can also produce angstrom level surface finish.

Citation Download Citation

Rajiv K. Singh, Arul Chakkaravarthi Arjunan, Kannan Balasundaram, Jinhyung Lee, George Ling, and Deepika Singh "Novel rapid polishing process for fabrication of sapphire windows", Proc. SPIE 8837, Material Technologies and Applications to Optics, Structures, Components, and Sub-Systems, 88370T (30 September 2013); https://doi.org/10.1117/12.2024689

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