7 September 2013 Analysis and modeling of tribology effects in conventional glass polishing
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Conventional or chemo-mechanical polishing represents the polishing technology most often applied for manufacturing precision glass optics. It is applied on various machine types and for all kinds of geometries. But it still represents the manufacturing step with the lowest process stability. This work deals with the analysis and descriptive modeling of contact conditions occurring in the process area. The polishing process is assumed as a hydrodynamic system. The model aims for a qualitative description of the formation of a fluid film between pad and surface. The models enable the theoretical discussion of the effects of major process parameters on the fluid film thickness. Secondly, the theoretical considerations are validated by experiments on a tribometer. With this test bench the effects of the polishing parameters as well pad properties on the contact conditions are investigated. Additional experiments are conducted on a polishing machine for validation the results. It is found, that the hydrodynamic theory describes the formation of fluid film in polishing. Under typical polishing conditions, the friction regime is in the range of mixed friction. That means pad asperities and polishing grains are not completely separated from the surface by a fluid film. The transition into erosive wear and pure liquid friction was not reached. But an analysis of the surface quality in dependence on the relative speed showed, that the quality starts decreasing after a minimum, far before reaching the transition point. Based on the derived qualitative description, the effects of process parameters and pad properties on the fluid film can be discussed.
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Daniel Waechter, Daniel Waechter, Olaf Dambon, Olaf Dambon, Fritz Klocke, Fritz Klocke, "Analysis and modeling of tribology effects in conventional glass polishing", Proc. SPIE 8838, Optical Manufacturing and Testing X, 88380V (7 September 2013); doi: 10.1117/12.2025491; https://doi.org/10.1117/12.2025491

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