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7 September 2013 Practical absolute optical surface metrology and novel applications in adaptive optics
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Abstract
A new absolute surface metrology scheme based on comparison of transversely-shifted frames from a commercial phase-shifting interferometer (PSI) will work well even when shifts are incommensurate with pixel size. When shifts span multiple pixels, interleaved data sets can, somewhat counterintuitively, still preserve the spatial resolution of component PSI frames, and furthermore non-integer-pixel shifts are easily handled with little loss of fidelity. While obviously useful in characterizing laboratory optics, where the new approach appears simpler and more sensitive than the classical three-flat technique, there are also interesting applications in adaptive optics systems, such as diagnosing non-common-path errors. This and other illustrative applications are briefly described.
© (2013) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
E. E. Bloemhof "Practical absolute optical surface metrology and novel applications in adaptive optics", Proc. SPIE 8838, Optical Manufacturing and Testing X, 883813 (7 September 2013); https://doi.org/10.1117/12.2024669
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