6 September 2013 Coaxial phase-shifting laser diode interferometer based on pulse modulation
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Abstract
A pulse-modulated phase-shifting interferometer that employs two coaxial interferometers and an undersampling technique is proposed and demonstrated. The former improves the robustness of the optical system, while the latter makes it economical. Several measurements on flat and concave mirrors confirmed a measurement accuracy of ~18 nm.
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Takamasa Suzuki, Takamasa Suzuki, Takuma Serizawa, Takuma Serizawa, Osami Sasaki, Osami Sasaki, Samuel Choi, Samuel Choi, } "Coaxial phase-shifting laser diode interferometer based on pulse modulation", Proc. SPIE 8839, Dimensional Optical Metrology and Inspection for Practical Applications II, 88390A (6 September 2013); doi: 10.1117/12.2023531; https://doi.org/10.1117/12.2023531
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